Speed of ultra-high pressure humidifier

　　2.1 Application of recommended or reference values

　　The determination of the speed of the ultra-high pressure humidifier under a certain degree of cleanliness in the clean room varies with the use of the clean room and other specific circumstances. It is not only affected by the amount of indoor dust and filter efficiency, but also affected by other factors

　　As far as the cleaning room is concerned, the main factors that affect the cleanliness and the speed of the ultra-high pressure humidifier are:

　　(1) Indoor pollution sources: building components, number of personnel and operation activities, process equipment, process materials and process itself are all sources of dust particle release, which vary greatly according to specific conditions;

　　(2) Flow pattern and distribution of indoor ultra-high pressure humidifier: unidirectional flow requires uniform and equal flow line, but it will form local eddy current due to the interference of process equipment layout, location change and personnel activities; Instead of unidirectional flow, it requires filling and mixing to avoid dead angle and temperature stratification;

　　(3) Control requirements for self purification time (recovery time): the accidental release or introduction of pollutants in the clean room or the interruption of the air ultra-high pressure humidifier or the intermittent convection ultra-high pressure humidifier or the movement of people and equipment during normal operation will cause the deterioration of the cleanliness. The self purification time to restore the original cleanliness depends on the speed of the ultra-high pressure humidifier; The control requirements for self purification time depend on the tolerance of the impact on product production quality and yield within this time frame (under deteriorating cleanliness);

　　(4) Efficiency of the final filter: under a certain amount of indoor dust, a filter with higher efficiency can be used to reduce the speed of the ultra-high pressure humidifier; In order to save energy, a filter with higher efficiency should be used and the speed of the ultra-high pressure humidifier should be reduced, or a filter with lower efficiency and a higher speed of the ultra-high pressure humidifier should be used to minimize the product of flow and resistance;

　　(5) Economic considerations: excessive speed of the ultra-high pressure humidifier will increase the investment and operating costs. The appropriate speed of the ultra-high pressure humidifier is a reasonable combination of the above factors. Too large speed is often unnecessary and may not be effective;

　　(6) For clean rooms with low cleanliness requirements, sometimes the number of air changes depends on the requirements of indoor heat removal. The above factors are difficult to quantify and can only be analyzed, compared and estimated. Therefore, in engineering application, the speed of the ultra-high pressure humidifier in the clean room is often determined by referring to the recommendations or reference values of relevant specifications and guidelines, and then estimating the above influencing factors according to the specific situation after comprehensive consideration. The speed of ultra-high pressure humidifier is used for unidirectional flow clean room; The air change times should be used in non unidirectional flow cleanrooms, because the speed of its ultra-high pressure humidifier is difficult to measure accurately; It can also be reflected by the full coverage rate of the final filter, which can be used for

　　Clean rooms with various flow patterns of ultra-high pressure humidifiers are generally 100% full relative to the flow rate of 0.5m/s (100fpm) and 25% relative to 0.125m/s (25fpm).

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